Substrate carrier deterioration detection and repair

ABSTRACT

A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.

PRIORITY

This is a divisional application of U.S. application Ser. No. 17/114,178filed Dec. 7, 2020, which is a divisional application of U.S. patentapplication Ser. No. 15/794,352 filed Oct. 26, 2017, now issued U.S.Pat. No. 10,861,692. Both applications are herein incorporated byreference in their entirety.

BACKGROUND

In semiconductor fabrication, a wafer undergoes many processing steps inorder to produce integrated circuits (“IC”) thereon. These processingsteps are performed by various different processing tools. Whentransferred among the processing tools, one or more wafers are carriedinside a wafer carrier to protect the wafers from outside contamination.In addition, the wafer carrier (with the wafers inside) is purged withan inert gas to remove any chemical residues on the wafers. Otherwise,the chemical residues could adversely affect the subsequent processing.

The wafer carriers usually have one or more air filters. These airfilters may become deteriorated (e.g., torn or clogged) after the wafercarrier is purged repeatedly. If the deteriorated air filter is notreplaced timely, the wafer carrier will not be purged effectively,leading to wafer contamination and manufacturing defects.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isemphasized that, in accordance with the standard practice in theindustry, various features are not drawn to scale. In fact, thedimensions of the various features may be arbitrarily increased orreduced for clarity of discussion.

FIG. 1 illustrates a schematic view of a portion of a system forsemiconductor fabrication, according to various aspects of the presentdisclosure.

FIG. 2 illustrates a schematic view of a substrate carrier purgestation, according to various aspects of the present disclosure.

FIG. 3 illustrates a substrate carrier repair station and a workflowtherein, according to various aspects of the present disclosure.

FIG. 4 illustrates a more detailed view of the substrate carrier repairstation, in accordance with an embodiment.

FIG. 5 shows a flow chart of a method for automatically detecting airfilter deterioration in a substrate carrier, according to variousaspects of the present disclosure.

FIG. 6 shows a flow chart of a method for automatically replacing asubstrate carrier, according to various aspects of the presentdisclosure.

FIG. 7 shows a flow chart of a method for automatically replacing partsin a substrate carrier, according to various aspects of the presentdisclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

The present disclosure is generally related to semiconductorfabrication, more particularly to systems and methods for handlingsubstrate carriers, such as wafer carriers, during semiconductorfabrication. An object of the present disclosure is to automaticallydetect deterioration in a substrate carrier, automatically replace thedeteriorated substrate carrier with a new substrate carrier, andautomatically repair the deteriorated substrate carrier. The presentdisclosure provides many benefits to semiconductor fabrication. First,it increases production efficiency and reduces production costs (e.g.,it requires less labor and less manual work). Second, it is morereliable and reduces operational errors. Third, it detects substratecarrier deterioration timely and reduces wafer defects. As used herein,a substrate may be a wafer (such as a silicon wafer having a diameter of125 mm, 150 mm, 200 mm, 300 mm, or 450 mm), a semiconductor substrate orwafer, a mask, a reticle, a plasma filtering plate, an adsorptive pad,any base material on which processing is conducted to produce new filmor layers of material, and/or combinations thereof.

FIG. 1 illustrates a schematic view of a portion of a semiconductorfabrication system 10, constructed according to aspects the presentdisclosure. Referring to FIG. 1 , the system 10 includes a plurality ofsemiconductor processing tools 12 including “Processing Tool 1,”“Processing Tool 2,” . . . “Processing Tool N.” The system 10 furtherincludes one or more substrate carrier purge stations 14, one or moresubstrate carrier change stations 16, and one or more substrate carrierrepair stations 18. The system 10 further includes an overhead hoisttransport (OHT) 20, like a highway passing along the various tools andstations, for transporting one or more substrate carriers 22. The system10 further includes an automation controller 24, such as an automatedmaterial handling system (AMHS), for dispatching the substrate carriers22 among the tools and stations. In various embodiments, the system 10may include other components, although not shown herein, or may omitsome of the components discussed herein.

Each of the processing tools 12 may perform one or more tasks inassociation with manufacturing integrated circuits on substrates such assemiconductor wafers. The tasks may include front end of line (FEOL)processing, middle end of line (MEOL) processing, and back end of line(BEOL) processing. For example, the tasks may include substratecleaning; material deposition such as epitaxy, chemical vapor deposition(CVD), physical vapor deposition (PVD), atomic layer deposition (ALD),and metal plating; etching such as dry etching, wet etching, reactiveion etching, and atomic layer etching (ALE); chemical mechanicalplanarization (CMP); baking; photoresist coating, exposing, developing,and ashing; and various other tasks. A processing tool 12 may processone substrate at a time or multiple substrates as a batch. In anembodiment, the processing tool 12 may include input and output loadingdocks that act as buffers for collecting a plurality of substratesbefore and after the processing.

A substrate or a plurality of substrates is moved from one processingtool to another processing tool according to a fabrication flow.Typically, after a processing step, a substrate is removed from aprocess tool that performed the processing step and transferred to asubstrate carrier 22 where the substrate is temporarily stored untilsubsequent processing. The substrate carrier 22 provides a protectiveenclosure for housing therein one or more substrates, such as 1, 12, 13,or 25 substrates. In some embodiments, the substrate carrier 22 is afront opening unit pod (FOUP). FIG. 1 illustrates one substrate carrier22 as part of the system 10. In various embodiments, the system 10 mayinclude many substrate carriers 22 and the substrate carriers may be ofdifferent types. For example, substrate carriers for FEOL processing maybe different from substrate carriers for BEOL processing. For example,the former may provide cleaner environment for substrates housed thereinthan the latter.

Still referring to FIG. 1 , the carrier purge station 14 is configuredto purge the substrate carrier 22 with an inert gas to ensure that thesubstrate carrier 22 continues to provide a clean and secure environmentfor substrates housed therein. A typical semiconductor fabrication flowmay include many (e.g., about 70 to 100) purge steps. For example, thesubstrate carrier 22 may be purged after each of the following processesincluding dry etching, wet etching, ashing, dry cleaning, wet cleaning,deposition, CMP, plating, and other processes. For example, aftergathering a certain number of substrates processed by a processing tool12, the substrate carrier 22 may be transported (via the OHT 20) to thecarrier purge station 14. Then, the carrier purge station 14 purges thesubstrate carrier 22 with an inert gas such as nitrogen or extracleaning dry air. The purging removes chemical residues (e.g., NH₃, SO₄,F, Cl, NO₃, PO₄, etc.) from the substrate carrier 22. Thereafter, thesubstrate carrier 22 is transported (via the OHT 20) to the nextprocessing tool 12 for further processing. In some steps of afabrication flow, the substrate carrier 22 may be transported (via theOHT 20) from one processing tool 12 to another process tool 12 withoutbeing purged by the carrier purge station 14.

In the present embodiment, the substrate carrier 22 includes one or moreair filters that help ensure a clean enclosure. After repeated purging,these air filters may become deteriorated (e.g., torn or clogged). Thecarrier purge station 14 is configured to detect the deterioration inthese air filters, more details of which will be discussed inconjunction with FIG. 2 . When the carrier purge station 14 detects thatthe air filters (and other parts coupled to the air filters) are nolonger safe for the substrate carrier 22, it may indicate that to theautomation controller 24, which may subsequently dispatch the substratecarrier 22 to the carrier change station 16 via the OHT 20. The carrierpurge station 14 may communicate with the automation controller 24through wireless or wired communication channel(s).

The carrier change station 16 is configured to replace a deterioratedsubstrate carrier with a new substrate carrier. For example, it isoperable to move all substrates housed in the deteriorated substratecarrier into the new substrate carrier. It may also purge the newsubstrate carrier with an inert gas before releasing it to production(i.e., dispatching it to the processing tools 12). Alternatively, it maydispatch the new substrate carrier back to the carrier purge station 14,which purges the new substrate carrier. In some embodiments of thesystem 10, the carrier purge station 14 and the carrier change station16 may be implemented as one piece of equipment or as separate pieces ofequipment.

Deteriorated substrate carriers are dispatched (e.g., from either thecarrier purge station 14 or the carrier change station 16) to thecarrier repair station 18 via the OHT 20. In an embodiment, the carrierrepair station 18 is configured to receive the deteriorated substratecarrier, open one or more screws, covers, and/or housings that cover airfilters in the substrate carrier, remove the air filters, install newair filters, inspect the newly installed air filters, reinstall thescrews, covers, and/or housings, and release the substrate carrier backto production. More details of the systems and methods for implementingthe carrier repair station 18 will be further described in conjunctionwith FIGS. 3 and 4 .

The system 10 provides many advantages over existing semiconductorfabrication systems. For example, the carrier purge station 14 enablesautomatic detection of deterioration in a substrate carrier. Suchautomatic detection increases production efficiency and reducesoperational errors compared to visually inspecting the substrate carrierby an operator. For another example, the carrier repair station 18enables automatic part-replacement in a substrate carrier, which alsoincreases production efficiency and reduces operational errors comparedto manually replacing the parts by an operator.

Referring to FIG. 2 , illustrated therein is the carrier purge station14 purging a substrate carrier 22, in accordance with some embodiments.In the present embodiment, the substrate carrier 22 includes a body (oran outer cover) 26 and grooves or other structures inside the body 26for securing a plurality of substrates (e.g., silicon wafers) 31therein. The substrate carrier 22 further includes a handle 28 forattaching it to the OHT 20. The substrate carrier 22 further includes adoor (not shown), through which the substrate 31 are placed into ortaken out of the substrate carrier 22. The substrate carrier 22 includesan inlet 30 having an inlet air filter 32 installed therein, and anoutlet 34 having an outlet air filter 36 installed therein. Within theinlet 30 and the outlet 34, the substrate carrier 22 may further includea filter housing (not shown) for securing the air filter, a cover (notshown) for fixing the filter housing, and optionally an O-ring (notshown) between the filter housing and the respective air filter. In someembodiments, the substrate carrier 22 may include more than one inletand more than one outlet. In an embodiment, the substrate carrier 22 mayfurther include a sensor 60 inside the housing 26. The sensor 60 may bea humidity sensor or an air pressure sensor.

Still referring to FIG. 2 , in the present embodiment, the carrier purgestation 14 includes a stage or base 40, an alignment sensor 42 foraiding the alignment of the carrier purge station 14 with the OHT 20,guide pins 44 for aligning the carrier purge station 14 with thesubstrate carrier 22 (e.g., by fitting into guide holes in the substratecarrier 22), an inlet 46 for supplying purge gas 50 into the inlet 30 ofthe substrate carrier 22, and an outlet 48 for extracting exhaust gas 52out of the outlet 34 of the substrate carrier 22. The purge gas 50 mayinclude nitrogen gas, extra clean dry air, or other suitable inertgas(es). As illustrated in FIG. 2 , the purge gas 50 drives somechemical residues or particles 33 out of the substrate carrier 22 andinto the exhaust gas 52. Some chemical residues or particles 33 may beadsorbed by the outlet air filter 36.

As discussed above, the same substrate carrier 22 may undergo numerouspurging operations. After repeated use, the air filter 32 and/or the airfilter 36 may deteriorate. For example, deposition of particles thereonmay clog the air filters 32 and 36, thereby increasing its flowresistance and reducing its filtration quality. For another example, theair filters 32 and 36 may lose its mechanical strength and may becometorn over time. Once the air filters 32 and 36 are torn, the substratecarrier 22 will lose its effectiveness in protecting the substrates 31against the ambient. Therefore, detecting such deterioration (e.g.,clogging or torn) timely is important for ensuring quality production.

In the present embodiment, the carrier purge station 14 further includesone or more humidity sensors 62, one or more gas flow rate sensors 64,and one or more particle sensors 66. The humidity sensor 62, the gasflow rate sensor 64, and the particle sensor 66 are installed near theoutlet 48 in the present embodiment. Further, the sensors 62, 64, and 66have direct contact with the exhaust gas 52 during the purging. Thehumidity sensor 62 is operable to detect the humidity of the exhaust gas52. The gas flow rate sensor 64 is operable to detect the flow rate ofthe exhaust gas 52. The carrier purge station 14 may further includeanother gas flow rate sensor (not shown) that is operable to detect theflow rate of the purge gas 50. The particle sensor 66 is operable todetect the sizes of the particles in the exhaust gas 52 in anembodiment. Alternatively or additionally, the particle sensor 66 isoperable to detect the number of particles (or the particle count) inthe exhaust gas 52 or is operable to detect the density of particles inthe exhaust gas 52. In various embodiments, the carrier purge station 14may include one particle sensor 66 for detecting particle sizes,particle count, and particle density in the exhaust gas 52, or it mayinclude separate particle sensors for performing the above functionsrespectively. Using the various sensors 60, 62, 64, and 66, the carrierpurge station 14 is able to generate a health indicator of the substratecarrier 22. In an embodiment, the health indicator indicates whether ornot the air filters 32 and 36 need to be replaced.

The carrier purge station 14 further includes a detection controller 68.In the present embodiment, the detection controller 68 is a computerizedtool such as a computer with software running thereon. For example, thedetection controller 68 may include a processor or a microprocessor, aninput device, a memory device, and a communication device interconnectedby one or more buses; and may execute software instructions forperforming various tasks of the carrier purge station 14. Some of thesetasks are discussed below.

In an embodiment, the carrier purge station 14 generates the healthindicator based on a measurement of air pressure inside the substratecarrier 22. For example, the detection controller 68 may read the airpressure value measured by the sensor 60, for example, using a wired orwireless connection between the two. For another example, the detectioncontroller 68 may detect the air pressure inside the substrate carrier22 without using the sensor 60. Instead, it may calculate the airpressure inside the substrate carrier 22 based on the flow rate of theexhaust gas 52 (detected by the gas flow rate sensor 64) and optionallythe flow rate of the purge gas 50. The detection controller 68 mayutilize other methods or mechanisms for detecting or measuring the airpressure inside the substrate carrier 22. Once knowing the value of theair pressure inside the substrate carrier 22, the detection controller68 may then compare it with an expected or predefined air pressure range(i.e., having an upper limit and a lower limit). If the measured ordetected air pressure value is outside the predefined air pressurerange, then the health indicator is triggered to indicate that thesubstrate carrier 22 needs repair.

In an embodiment, the carrier purge station 14 generates the healthindicator based on a measurement of humidity in the exhaust gas 52. Forexample, the detection controller 68 may read a humidity value of theexhaust gas 52 measured by the humidity sensor 62, and compare themeasured humidity value with a predefined humidity range (i.e., havingan upper limit and a lower limit). If the measured humidity value isoutside the predefined humidity range, then the health indicator istriggered to indicate that the substrate carrier 22 needs repair.

In another embodiment, the carrier purge station 14 generates the healthindicator based on a measurement of flow rate in the exhaust gas 52. Forexample, the detection controller 68 may read a flow rate value of theexhaust gas 52 measured by the gas flow rate sensor 64, and compare themeasured flow rate value with a predefined flow rate range (i.e., havingan upper limit and a lower limit). If the measured flow rate value isoutside the predefined flow rate range, then the health indicator istriggered to indicate that the substrate carrier 22 needs repair. Forexample, a very low flow rate indicates that the air filter 32 and/orair filter 36 may have been clogged, and a very high flow rate indicatesthat the air filter 32 and/or air filter 36 may have been torn.

In yet another embodiment, the carrier purge station 14 generates thehealth indicator based on a measurement of particle sizes in the exhaustgas 52. For example, the detection controller 68 may read the maximumparticle size detected by the particle sensor 66, and compare that valuewith a particle size threshold. If the detected particle size exceedsthe particle size threshold, then the health indicator is triggered toindicate that the substrate carrier 22 needs repair. For example, havinglarge particles in the exhaust gas 52 indicates that the air filter 36has lost its expected filtration capability.

In yet another embodiment, the carrier purge station 14 generates thehealth indicator based on a measurement of particle count in the exhaustgas 52. For example, the detection controller 68 may read the particlecount measured by the particle sensor 66, and compare that value with aparticle count threshold. If the detected particle count exceeds theparticle count threshold, then the health indicator is triggered toindicate that the substrate carrier 22 needs repair. For example, havingtoo many particles in the exhaust gas 52 indicates that the air filter32 and/or the air filter 36 have lost the expected filtrationcapability.

FIG. 3 illustrates an embodiment of the carrier repair station 18 andthe OHT 20 in perspective view, and a workflow therein, according tovarious aspects of the present disclosure. Referring to FIG. 3 , in thepresent embodiment, the carrier repair station 18 includes an input port80 for receiving a substrate carrier 22 from the OHT 20 and an outputport 82 for releasing the substrate carrier 22 to the OHT 20 after therepair. Between the input port 80 and the output port 82, the carrierrepair station 18 further includes a first mechanism (e.g., a roboticarm) for removing screws, covers, and/or filter housing from thesubstrate carrier 22 to expose the air filters 32 and 36 (FIG. 2 ); anda second mechanism (e.g., one or more robotic arms) for removing the oldair filters from and installing new air filters into the substratecarrier 22. In an embodiment, the carrier repair station 18 furtherincludes a third mechanism (e.g., a robotic arm) for reinstalling thescrews, covers, and/or filter housing into the substrate carrier 22. Inan alternative embodiment, the first and third mechanisms share the samedevice or robotic arm(s). The carrier repair station 18 may furtherinclude an automatic inspection mechanism (e.g., optical sensors) forinspecting the newly installed air filters in the substrate carrier 22.The carrier repair station 18 includes a controller 104 for coordinatingthe workflow within the station.

FIG. 4 illustrates a more detailed view of the carrier repair station18, in accordance with an embodiment. Referring to FIG. 4 , the inputport 80 and the output port 82 may be designed to hold one substratecarrier 22 at a time. Alternatively, they may be designed to holdmultiple substrate carriers 22 at a time. Further, the input port 80 andthe output port 82 may be designed to accommodate different types ofsubstrate carriers 22, e.g., having different sizes and configurations.Once a substrate carrier 22 is received by the input port 80, a carriermover 84 is operable to move the substrate carrier 22 from the inputport 82 to other components of the carrier repair station 18 such as anopener/closer 86, a rotator 88, an installer/uninstaller 90, and anassembly inspector 94. FIG. 4 illustrates multiple substrate carriers 22being repaired by the carrier repair station 18 in a streamlinedfashion.

In the present embodiment, the rotator 88 is operable to rotate thesubstrate carrier 22 into a position so that the air filters and otherparts of the substrate carrier 22 can be easily accessed by variouscomponents in the carrier repair station 18 such as the opener/closer86, the installer/uninstaller 90, and the assembly inspector 94. Forexample, different types of substrate carriers (e.g., substrate carriersfor FEOL, substrate carriers for BEOL, substrate carriers from differentvendors, etc.) may have their air filters installed in differentlocations of the respective substrate carriers. The rotator 88 may beconfigured to rotate the substrate carriers 22 so that the air filterstherein always appear in the same place with respect to theopener/closer 86, the installer/uninstaller 90, and the assemblyinspector 94 regardless the type of the substrate carrier 22.

The opener/closer 86 is operable to open a filter housing of thesubstrate carrier 22, e.g., by unscrewing a cover and pulling out thefilter housing, and to close the filter housing, e.g., by inserting thefilter housing back into the substrate carrier and screwing the coverback on. The installer/uninstaller 90 is operable to remove old airfiltration parts such as O-rings and air filters and installcorresponding new parts. The assembly inspector 94 is operable toinspect newly installed parts, and particularly newly installed airfilters. In an embodiment, the assembly inspector 94 includes a laserand/or optical sensors for detecting the flatness of the air filterafter it has been installed into the substrate carrier 22. In anotherembodiment, the assembly inspector 94 includes a camera for taking animage of the air filter, which may be used by the controller 104 todetermine the flatness of the air filter. In yet another embodiment, theassembly inspector 94 is operable to check the alignment of the newlyinstalled air filter with respect to the inlet 30 and/or the outlet 34(FIG. 2 ). After the substrate carrier 22 has passed the inspection bythe assembly inspector 94, the carrier mover 84 may transfer thesubstrate carrier 22 to the output port 82.

The carrier repair station 18 further includes various components forsupplying new parts such as new air filters and new O-rings to theinstaller/uninstaller 90. In the present embodiment, the carrier repairstation 18 includes one or more parts containers 98 for holding the newparts, a parts inspector 96 for inspecting the new parts, a slider 92for supplying the new parts that have passed the inspection to theinstaller/uninstaller 90, a parts disposal 100 for holding old partsthat are removed from the substrate carrier 22, and a parts diagnosiscontainer 102 for holding new parts that have failed the inspection. Inan embodiment, the parts inspector 96 includes a camera (e.g., a CCDcamera or a CMOS camera) for taking an image of a new part (e.g., a newair filter) and the controller 104 may determine from the image whetheror not the new part has good quality, such as having expected size andshape and free of wrinkles and holes.

It is noted that the carrier repair station 18 in some embodiments mayinclude additional components not shown herein and in some embodimentsmay omit some of the components discussed above. Further, somecomponents discussed herein may be combined into one component inembodiments of the carrier repair station 18.

FIG. 5 illustrates a flow chart of a method 200 for purging a substratecarrier and automatically detecting deterioration in the substratecarrier according to aspects of the present disclosure. For example,embodiments of the method 200 may be implemented by or with the carrierpurge station 14. The method 200 is merely an example, and is notintended to limit the present disclosure beyond what is explicitlyrecited in the claims. Additional operations can be provided before,during, and after the method 200, and some operations described can bereplaced, eliminated, or moved around for additional embodiments of themethod. The method 200 is further described below in conjunction withFIGS. 1-2 .

At operation 202, the method 200 (FIG. 5 ) receives a carrier, such asthe substrate carrier 22. The carrier houses a plurality of substratestherein. With reference to FIG. 1 , the carrier may be received by thecarrier purge station 14 from one of the processing tools 12 or from thecarrier change station 16 via the OHT 20. The plurality of substratesmay be silicon wafers in one example. The carrier includes an inlet forreceiving a purge gas and an outlet for discharging an exhaust gas. Thecarrier further includes an inlet air filter at the inlet and an outletair filter at the outlet.

At operation 204, the method 200 (FIG. 5 ) supplies a purge gas into thecarrier, e.g., through the inlet of the carrier. In some embodiments,the purge gas may be supplied at a flow rate of 1 to 15 liter per minute(L/min). The purge gas may include nitrogen gas, extra clean dry air, orother suitable inert gases. At operation 206, the method 200 extracts anexhaust gas from the carrier, e.g., through the outlet of the carrier.The operations 204 and 206 may be performed simultaneously. Further, theoperations 204 and 206 may be performed for about 10 to 650 seconds insome embodiments.

While performing the operations 204 and 206, the method 200 (FIG. 5 )further includes an operation 208 that monitors operational environmentof the carrier. For example, the operation 208 may include one or moreof the operations 208 a, 208 b, 208 c, 208 d, 208 e, and 208 f. Theoperation 208 a measures air pressure inside the carrier. The operation208 b measures humidity in the exhaust gas. The operation 208 c measuresthe flow rate of the exhaust gas. The operation 208 d measures aparticle count in the exhaust gas. The operation 208 e measures particlesizes in the exhaust gas. The operation 208 f measures the flow rate ofthe purge gas.

At operation 210, the method 200 (FIG. 5 ) generates a health indicatorof the carrier based on the operational environment of the carrier. Forexample, the health indicator may be generated based on one or more ofthe following: (a) whether the air pressure measured by the operation208 a is outside a predefined air pressure range, (b) whether thehumidity level measured by the operation 208 b is outside a predefinedhumidity range, (c) whether the exhaust flow rate measured by theoperation 208 c is outside a predefined flow rate range, (d) whether theparticle count measured by the operation 208 d exceeds a particle countthreshold, and (e) whether the particle size measured by the operation208 e exceeds a particle size threshold. If one or more of the aboveconditions are satisfied, the health indicator takes a value indicatingthat the carrier is unhealthy. The method 200 may additionally oralternatively use other criteria to generate the health indicator.

At operation 212, the method 200 (FIG. 5 ) determines if the carrierneeds repair. In an embodiment, if the health indicator indicates thatthe carrier is unhealthy, then the carrier is due for repair. In anotherembodiment, the method 200 may keep track of the number of purgeoperations applied to the same carrier. If that number exceeds athreshold, then the carrier is due for repair. For example, an airfilter may have a maximum limit of use (i.e., the lifetime of the airfilter), which may be specified by the air filter vendor or the carriervendor. Once this limit is reached, the air filter has reached the endof its usable life and it is deemed unsafe for further uses. In thiscase, the method 200 may determine that the carrier needs repairregardless whether the health indicator indicates that the carrier isunhealthy.

If the operation 212 determines that the carrier does not need repair,the method 200 dispatches the carrier (operation 214) to the nextprocessing tool for further fabrication processes. If the operation 212determines that the carrier needs repair, the method 200 dispatches thecarrier (operation 216) to a carrier change station where the substrateshoused in the carrier may be removed from the carrier and placed intoanother carrier.

FIG. 6 illustrates a flow chart of a method 300 for changing out asubstrate carrier according to aspects of the present disclosure. Forexample, embodiments of the method 300 may be implemented by or with thecarrier change station 16. The method 300 is merely an example, and isnot intended to limit the present disclosure beyond what is explicitlyrecited in the claims. Additional operations can be provided before,during, and after the method 300, and some operations described can bereplaced, eliminated, or moved around for additional embodiments of themethod.

At operation 302, the method 300 receives a carrier with substrateshoused therein. With reference to FIG. 1 , the carrier may be receivedby the carrier change station 16 from the carrier purge station 14 viathe OHT 20. At operation 304, the method 300 opens the carrier and movesthe substrates from the carrier to another carrier (“new carrier”). Atoperation 306, the method 300 purges the new carrier with the substrateshoused therein, for example, by the carrier purchase station 14 (FIG. 1). After purging, the method 300 releases the new carrier to production(operation 308), for example, by dispatching the new carrier with thesubstrates housed therein to a processing tool 12 (FIG. 1 ). Atoperation 310, the method 300 sends the old carrier to a carrier repairstation, such as carrier repair station 18, for repair.

FIG. 7 illustrates a flow chart of a method 400 for repairing asubstrate carrier according to aspects of the present disclosure. Forexample, embodiments of the method 400 may be implemented by or with thecarrier repair station 18. The method 400 is merely an example, and isnot intended to limit the present disclosure beyond what is explicitlyrecited in the claims. Additional operations can be provided before,during, and after the method 400, and some operations described can bereplaced, eliminated, or moved around for additional embodiments of themethod.

At operation 402, the method 400 (FIG. 7 ) receives a carrier. In thepresent embodiment, the carrier is free of substrates therein. Withreference to FIG. 1 , the carrier may be received by the carrier repairstation 18 from the carrier change station 16 via the OHT 20.Particularly, the carrier may be received by the input port 80 of thecarrier repair station 18 (FIGS. 3-4 ).

At operation 404, the method 400 (FIG. 7 ) removes covers on inlet andoutlet housings of the carrier, for example, by unscrewing the covers.At operation 406, the method 400 optionally rotates the carrier so thatthe housing and air filters therein may be easily accessed. An operation408, the method 400 uninstalls the inlet and outlet housings from thecarrier to expose the air filters in the carrier. At operation 410, themethod 400 removes an O-ring, if any, from the carrier. At operation412, the method 400 removes inlet and outlet air filters from thecarrier.

At operation 414, the method 400 (FIG. 7 ) retrieves new parts to beinstalled into the carrier, such as new air filters and optionally newO-rings. At operation 416, the method 400 inspects the new parts toensure that they are free of defects. If the defects are found in thenew parts, the method 400 may repeat the operations 414 and 416 until itfinds new parts free of defects.

At operation 418, the method 400 (FIG. 7 ) installs the new parts, suchas new inlet and outlet air filters, into the carrier. The method 400may optionally install new O-rings into the carrier if needed. Atoperation 420, the method 400 reinstalls the inlet and outlet housingsand the covers back onto the carrier. At operation 422, the method 400inspects the newly installed parts. For example, it may use opticalsensors to detect surface flatness of newly installed air filters. Ifthe newly installed parts fail the inspection, the method 400 goes backto the operation 408 and repeats the operations 408-422. If the newlyinstalled parts pass the inspection, the method 400 releases the carrierback to production (operation 424). With reference to FIGS. 3-4 , thecarrier may be placed into the output report 82 and waits fordispatching via the OHT 20.

In an embodiment, one or more of the above operations of the method 400are implemented with computerized mechanical devices, such as roboticarms. This advantageously reduces fabrication downtime and increases thereliability and quality of the carrier.

Although not intended to be limiting, one or more embodiments of thepresent disclosure provide many benefits to semiconductor fabrication.For example, embodiments of the present disclosure automatically detectdeterioration in a substrate carrier, which reduces manual work andincreases production efficiency. It is also more reliable and timely,thereby reducing wafer defects. Further, embodiments of the presentdisclosure automatically replace deteriorated air filters in substratecarriers, thereby increasing production efficiency and reducingoperational errors.

In one exemplary aspect, the present disclosure is directed to a method.The method includes receiving a carrier with a plurality of wafersinside; supplying a purge gas to an inlet of the carrier; extracting anexhaust gas from an outlet of the carrier; and generating a healthindicator of the carrier while performing the supplying of the purge gasand the extracting of the exhaust gas.

In an embodiment of the method, the generating of the health indicatoris based on one or more of following: (a) a measurement of air pressureinside the carrier, (b) a measurement of humidity of the exhaust gas,(c) a measurement of a flow rate of the exhaust gas, and (d) ameasurement of particles in the exhaust gas.

In another embodiment of the method, the generating of the healthindicator includes reading an air pressure value measured by a pressuresensor installed inside the carrier; comparing the air pressure valuewith a predefined air pressure range; and indicating that the carrierneeds repair when the air pressure value is outside the predefined airpressure range.

In another embodiment of the method, the generating of the healthindicator includes reading a humidity value of the exhaust gas measuredby a humidity sensor installed adjacent the outlet of the carrier;comparing the humidity value with a predefined humidity range; andindicating that the carrier needs repair when the humidity value isoutside the predefined humidity range.

In another embodiment of the method, the generating of the healthindicator includes measuring a flow rate of the exhaust gas; comparingthe flow rate with an predefined flow rate range; and indicating thatthe carrier needs repair when the flow rate is outside the predefinedflow rate range.

In another embodiment of the method, the generating of the healthindicator includes measuring sizes of particles carried in the exhaustgas; comparing the sizes with a size threshold; and indicating that thecarrier needs repair when one of the sizes exceeds the size threshold.

In yet another embodiment of the method, the generating of the healthindicator includes measuring a count of particles carried in the exhaustgas; comparing the count with a count threshold; and indicating that thecarrier needs repair when the count exceeds the count threshold.

In an embodiment, when the health indicator indicates that the carrierneeds repair, the method further includes removing the plurality ofwafers from the carrier; and dispatching the carrier to a carrier repairstation through an overhead transport (OHT). In a further embodiment,the method includes receiving the carrier by the carrier repair station;replacing, by a first motorized tool, an inlet filter at the inlet ofthe carrier with a new inlet filter; replacing, by a second motorizedtool, an outlet filter at the outlet of the carrier with a new outletfilter; and inspecting, by a third motorized tool, the new inlet filterand the new outlet filter. In a further embodiment, the method includes,on condition that both the new inlet filter and the new outlet filterpass the inspection, dispatching the carrier with the new inlet filterand the new outlet filter to a process tool through the OHT. In anotherfor the embodiment, the method includes, on condition that one of thenew inlet filter and the new outlet filter fails the inspection,replacing the one of the new inlet filter and the new outlet filter witha replacement filter; and inspecting the replacement filter.

In another exemplary aspect, the present disclosure is directed to anapparatus for semiconductor manufacturing. The apparatus includes aninput port to receive a carrier, wherein the carrier includes a carrierbody, a housing installed onto the carrier body, and a filter installedbetween the carrier body and the housing; a first robotic arm touninstall the housing from the carrier and to install the housing intothe carrier; one or more second robotic arms to remove the filter fromthe carrier and to install a new filter into the carrier; and an outputport to release the carrier to production.

In an embodiment, the one or more second robotic arms are furtherconfigured to install and uninstall an O-ring between the filter and thehousing. In an embodiment, the apparatus further includes a firstinspection mechanism to inspect the new filter before it is installed bythe one or more second robotic arms. In an embodiment, the firstinspection mechanism includes a camera to take an image of the newfilter; and a controller to determine quality of the new filter based onthe image.

In an embodiment, the apparatus further includes a second inspectionmechanism to inspect the new filter after it has been installed by theone or more second robotic arms. In an embodiment, the second inspectionmechanism includes a laser mechanism to detect flatness of a surface ofthe new filter.

In another exemplary aspect, the present disclosure is directed to asystem. The system includes a plurality of semiconductor processingtools; a carrier purge station; a carrier repair station; and anoverhead transport (OHT) loop for transporting one or more substratecarriers among the plurality of semiconductor processing tools, thecarrier purge station, and the carrier repair station. The carrier purgestation is configured to receive a substrate carrier from one of theplurality of semiconductor processing tools, purge the substrate carrierwith an inert gas, and determine if the substrate carrier needs repair.The carrier repair station is configured to receive a substrate carrierto be repaired and replace one or more parts in the substrate carrier.

In an embodiment, the system further a carrier change station configuredto receive a substrate carrier with substrates, remove the substratesfrom the substrate carrier, and place the substrates into anothersubstrate carrier.

In another embodiment of the system, the carrier purge station isconfigured to determine if the substrate carrier needs repair based onat least one of following: whether the one or more parts in thesubstrate carrier have reached their respective lifetime; a measurementof air pressure inside the substrate carrier while purging the substratecarrier; a measurement of exhaust humidity while purging the substratecarrier; a measurement of an exhaust flow rate while purging thesubstrate carrier; and a measurement of particles in exhaust whilepurging the substrate carrier.

In an embodiment of the system, the one or more parts include an airfilter in the substrate carrier. In another embodiment of the system,the substrate carrier is configured to carry a plurality of wafers.

In another exemplary aspect, the present disclosure is directed to amethod. The method includes purging a wafer carrier to produce anexhaust gas; and determining if the wafer carrier needs repair based onone or more of following: whether air pressure inside the wafer carrieris within a predefined air pressure range, whether humidity of theexhaust gas is within a predefined humidity range, whether a flow rateof the exhaust gas is within a predefined flow rate range, whether sizesof particles in the exhaust gas are smaller than a size threshold,whether a count of particles in the exhaust gas is smaller than a countthreshold, and whether a filter in the wafer carrier has reached its endof life.

In an embodiment, when the determining determines that the wafer carrierneeds repair, the method further includes sending the wafer carrier to acarrier repair station using an overhead transport (OHT) loop; andreplacing one or more parts of the wafer carrier by the carrier repairstation. In a further embodiment, the replacing of the one or more partsincludes: receiving the wafer carrier using the OHT loop; removing theone or more parts from the wafer carrier with at least one robotic arm;installing one or more replacement parts into the wafer carrier with atleast another robotic arm; and inspecting the one or more replacementparts with at least one optical device. In a further embodiment, oncondition that the one or more replacement parts pass the inspection,the method further includes releasing the wafer carrier to asemiconductor processing tool using the OHT loop.

In another exemplary aspect, the present disclosure is directed to anapparatus. The apparatus includes an input port to receive a wafercarrier; a supply container to hold a plurality of new air filters; afirst mechanism to remove an air filter from the wafer carrier; a secondmechanism to pick up a new air filter from the supply container; a thirdmechanism to install the new air filter into the wafer carrier; and anoutput port to deliver the wafer carrier after the new air filter hasbeen installed.

In an embodiment, the apparatus further includes a rotator to rotate thewafer carrier. In another embodiment, the apparatus further includes afourth mechanism to remove a housing from the wafer carrier to exposethe air filter, wherein the fourth mechanism is configured to re-installthe housing after the new air filter has been installed.

In an embodiment, the apparatus further includes a first inspectionmechanism to inspect the new air filter before it is installed into thewafer carrier. In an embodiment, the apparatus further includes adisposal container to receive the air filter after it is removed fromthe wafer carrier. In yet another embodiment, the apparatus furtherincludes a second inspection mechanism to inspect the new air filterafter it is installed into the wafer carrier.

In yet another exemplary aspect, the present disclosure is directed to asystem. The system includes a plurality of semiconductor processingtools; a wafer carrier; a wafer carrier purge station; a wafer carrierchange station; a wafer carrier repair station; and an overheadtransport (OHT) system for transporting the wafer carrier among thesemiconductor processing tool, the wafer carrier purge station, thewafer carrier change station, and the wafer carrier repair station.

In an embodiment of the system, one of the plurality of semiconductorprocessing tools is configured to: receive the wafer carrier with aplurality of wafers using the OHT system; process the plurality ofwafers, resulting in a plurality of processed wafers; and transfer theplurality of processed wafers to the wafer carrier to be sent to thewafer carrier purge station using the OHT system.

In another embodiment, the wafer carrier purge station is configured to:receive the wafer carrier with a plurality of wafers using the OHTsystem; supply a purge gas into the wafer carrier; and monitor anexhaust gas from the wafer carrier. In a further embodiment, the wafercarrier purge station is configured to monitor the exhaust gas todetermine at least one of: humidity of the exhaust gas; a flow rate ofthe exhaust gas; a particle count in the exhaust gas; and particle sizesin the exhaust gas. In another further embodiment, the wafer carrierpurge station is further configured to monitor air pressure inside thewafer carrier. In yet another further embodiment, the wafer carrierpurge station is further configured to determine whether the wafercarrier needs repair.

In an embodiment of the system, the wafer carrier change station isconfigured to: receive the wafer carrier with a plurality of wafersusing the OHT system; move the plurality of wafers from the wafercarrier into another wafer carrier; and send the wafer carrier withoutany wafer to the wafer carrier repair station using the OHT system. In afurther embodiment, the wafer carrier repair station is configured to:receive the wafer carrier without any wafer using the OHT system; removea housing from the wafer carrier to expose an air filter; replace theair filter with a new air filter; re-install the housing into the wafercarrier; and release the wafer carrier with the new air filter using theOHT system.

The foregoing outlines features of several embodiments so that those ofordinary skill in the art may better understand the aspects of thepresent disclosure. Those of ordinary skill in the art should appreciatethat they may readily use the present disclosure as a basis fordesigning or modifying other processes and structures for carrying outthe same purposes and/or achieving the same advantages of theembodiments introduced herein. Those of ordinary skill in the art shouldalso realize that such equivalent constructions do not depart from thespirit and scope of the present disclosure, and that they may makevarious changes, substitutions, and alterations herein without departingfrom the spirit and scope of the present disclosure.

What is claimed is:
 1. A system, comprising: a plurality of semiconductor processing tools; a carrier repair station having one or more robotic arms; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools and the carrier repair station, wherein the carrier repair station is configured to receive a substrate carrier that includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing, wherein the one or more robotic arms are configured to replace the filter with a new filter.
 2. The system of claim 1, further comprising: a carrier change station configured to receive a substrate carrier with substrates, remove the substrates from the substrate carrier, and place the substrates into another substrate carrier.
 3. The system of claim 1, wherein the one or more robotic arms are further configured to uninstall and install an O-ring between the filter and the housing.
 4. The system of claim 1, further comprising an automation controller, wherein the automation controller is configured to dispatch the one or more substrate carriers among the plurality of semiconductor processing tools and the carrier repair station.
 5. The system of claim 1, further comprising a carrier purge station configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs rep air.
 6. The system of claim 1, wherein the carrier repair station further includes a controller configured to determine quality of the new filter before the new filter is installed into the substrate carrier.
 7. The system of claim 1, wherein the one or more robotic arms include a first robotic arm configured to uninstall the housing from the substrate carrier and to reinstall the housing into the substrate carrier after the new filter has been installed into the substrate carrier.
 8. The system of claim 7, wherein the one or more robotic arms include one or more second robotic arms configured to remove the filter from the substrate carrier and to install the new filter into the substrate carrier.
 9. The system of claim 1, wherein the substrate carrier is configured to carry a plurality of wafers.
 10. A system, comprising: a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station, wherein the carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair, wherein the carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.
 11. The system of claim 10, further comprising: a carrier change station configured to receive a substrate carrier with substrates, remove the substrates from the substrate carrier, and place the substrates into another substrate carrier.
 12. The system of claim 10, wherein the carrier purge station is configured to determine if the substrate carrier needs repair based on at least one of following: whether the one or more parts in the substrate carrier have reached their respective lifetime; a measurement of air pressure inside the substrate carrier while purging the substrate carrier; a measurement of exhaust humidity while purging the substrate carrier; a measurement of an exhaust flow rate while purging the substrate carrier; and a measurement of particles in exhaust while purging the substrate carrier.
 13. The system of claim 10, wherein the one or more parts include an air filter in the substrate carrier.
 14. The system of claim 10, wherein the substrate carrier is configured to carry a plurality of wafers.
 15. An automatic method for semiconductor manufacturing, comprising: receiving a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a first filter installed between the carrier body and the housing; uninstalling the housing from the carrier; removing the first filter from the carrier; installing a second filter into the carrier; reinstalling the housing on the carrier; and returning the carrier to production, wherein at least one of the uninstalling, the removing, the installing, and the reinstalling is performed by a robotic arm.
 16. The method of claim 15, wherein the uninstalling and the reinstalling of the housing are performed by one or more first robotic arms including the robotic arm.
 17. The method of claim 16, wherein the removing of the first filter and the installing of the second filter are performed by one or more second robotic arms different from the one or more first robotic arms.
 18. The method of claim 15, further comprising: inspecting the second filter after the second filter has been installed and before returning the carrier to production.
 19. The method of claim 18, wherein the step of inspecting includes shining a laser to detect flatness of a surface of the second filter.
 20. The method of claim 18, on condition that the second filter fails the inspecting, further comprising: repeating the steps of uninstalling, removing, installing, reinstalling, and inspecting such that the second filter is removed and a third filter is installed and inspected. 